Featured Products and Demonstrations:

• Cleanroom Wafer Stocking Demo
  See how a custom cleanroom-compatible OVR SCARA Robot transports semiconductor components between stations
•  αSTEP Hybrid Step-Servo AZ Family
   AZ Series Stepper Motors, DRS compact linear actuators, and DG hollow rotary actuators are just some of the αSTEP family of products you can explore that allow for accurate, delicate movement during semiconductor processes.
  

  • AZ Series motors handle high inertial loads effectively and use responsive, reliable closed-loop technology suitable for wafer transfer​

  • DRS compact linear actuators are suitable for repeatable, precise movements during wafer transfer​

  • DGII hollow rotary actuators are suitable for indexing or polishing where precise control is required​